A spectroscopic method for determining thickness of quartz wave plate
A spectroscopic method for determining thickness of quartz wave plate
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发表时间：
2006-12
影响因子：
3.5
通讯作者：
Weiwei Feng;Li-huang Lin;Ligang Chen;Huafeng Zhu;Ruxin Li;Zhi‐zhan Xu
中科院分区：
文献类型：
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作者：
Weiwei Feng;Li-huang Lin;Ligang Chen;Huafeng Zhu;Ruxin Li;Zhi‐zhan Xu
提出了一种测量石英波片厚度的光谱方法。该方法是基于色偏振干涉。利用偏振分辨透射光谱曲线，可以在200 ~ 2000 nm的宽光谱范围内明显测定石英波片的相位延迟量。通过对长波段PRTS曲线极值点的准确判断，可以准确地得到石英波片的物理厚度。给出了测量实例和误差分析。结果表明，光谱仪的光谱分辨率是决定厚度测量精度的主要因素。
A spectroscopic method to determine thickness of quartz wave plate is presented. The method is based on chromatic polarization interferometry. With the polarization-resolved transmission spectrum (PRTS) curve, the phase retardation of quartz wave plate can be determined at a wide spectral range from 200 to 2000 nm obviously. Through accurate judgment of extreme points of PRTS curve at long-wave band, the physical thickness of quartz wave plates can be obtained exactly. We give a measuring example and the error analysis. It is found that the measuring precision of thickness is mainly determined by the spectral resolution of spectrometer.