Mini-MALTA: radiation hard pixel designs for small-electrode monolithic CMOS sensors for the High Luminosity LHC

Mini-MALTA: radiation hard pixel designs for small-electrode monolithic CMOS sensors for the High Luminosity LHC
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DOI:
10.1088/1748-0221/15/02/p02005
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发表时间:
2019-09
影响因子:
1.3
通讯作者:
M. Dyndał;V. Dao;P. Allport;I. Tortajada;M. Barbero;S. Bhat;D. Bortoletto;I. Berdalovic;C. Bespin;C. Buttar;I. Caicedo;R. Cardella;F. Dachs;Y. Degerli;H. Denizli;L. Acedo;P. Freeman;L. Gonella;A. Habib;T. Hemperek;T. Hirono;B. Hiti;T. Kugathasan;I. Mandić;D. Maneuski;M. Mikuž;K. Moustakas;M. Munker;K. Oyulmaz;P. Pangaud;H. Pernegger;F. Piro;P. Riedler;H. Sandaker;E. J. Schioppa;P. Schwemling;Abhishek Sharma;L. S. Argemi;C. S. Sánchez;W. Snoeys;T. Suligoj;Tianyang Wang;N. Wermes;S. Worm
M. Dyndał;V. Dao;P. Allport;I. Tortajada;M. Barbero;S. Bhat;D. Bortoletto;I. Berdalovic;C. Bespin;C. Buttar;I. Caicedo;R. Cardella;F. Dachs;Y. Degerli;H. Denizli;L. Acedo;P. Freeman;L. Gonella;A. Habib;T. Hemperek;T. Hirono;B. Hiti;T. Kugathasan;I. Mandić;D. Maneuski;M. Mikuž;K. Moustakas;M. Munker;K. Oyulmaz;P. Pangaud;H. Pernegger;F. Piro;P. Riedler;H. Sandaker;E. J. Schioppa;P. Schwemling;Abhishek Sharma;L. S. Argemi;C. S. Sánchez;W. Snoeys;T. Suligoj;Tianyang Wang;N. Wermes;S. Worm
中科院分区:
工程技术4区
文献类型:
--
作者:
M. Dyndał;V. Dao;P. Allport;I. Tortajada;M. Barbero;S. Bhat;D. Bortoletto;I. Berdalovic;C. Bespin;C. Buttar;I. Caicedo;R. Cardella;F. Dachs;Y. Degerli;H. Denizli;L. Acedo;P. Freeman;L. Gonella;A. Habib;T. Hemperek;T. Hirono;B. Hiti;T. Kugathasan;I. Mandić;D. Maneuski;M. Mikuž;K. Moustakas;M. Munker;K. Oyulmaz;P. Pangaud;H. Pernegger;F. Piro;P. Riedler;H. Sandaker;E. J. Schioppa;P. Schwemling;Abhishek Sharma;L. S. Argemi;C. S. Sánchez;W. Snoeys;T. Suligoj;Tianyang Wang;N. Wermes;S. Worm

文献摘要

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耗尽单片有源像素传感器(DMAPS)原型开发的TowerJazz 180 nm CMOS成像过程中已被设计的ATLAS升级第二阶段在HL-LHC的背景下。像素传感器的特点是收集电极小(3 μm),以最大限度地减少电容,像素尺寸小(36.4× 36.4 μm2),并在高电阻率外延p型硅上生产。该设计的目标辐射硬度为1×1015 1 MeV neq/cm 2,与ATLAS ITK Pixel探测器的最外层兼容。本文介绍了从粒子束测试的Mini-MALTA原型,实现了掩模的变化或额外的植入,以解决像素边缘的效率低下的表征结果。结果表明,在1×1015 1 MeV neq/cm 2的剂量后,完全效率。
Depleted Monolithic Active Pixel Sensor (DMAPS) prototypes developed in the TowerJazz 180 nm CMOS imaging process have been designed in the context of the ATLAS upgrade Phase-II at the HL-LHC. The pixel sensors are characterized by a small collection electrode (3 μm) to minimize capacitance, a small pixel size (36.4× 36.4 μm2), and are produced on high resistivity epitaxial p-type silicon. The design targets a radiation hardness of 1×1015 1 MeV neq/cm2, compatible with the outermost layer of the ATLAS ITK Pixel detector. This paper presents the results from characterization in particle beam tests of the Mini-MALTA prototype that implements a mask change or an additional implant to address the inefficiencies on the pixel edges. Results show full efficiency after a dose of 1×1015 1 MeV neq/cm2.