Fabrication of CNTs/Cu composite thin films for interconnects application
Fabrication of CNTs/Cu composite thin films for interconnects application
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DOI:
10.1016/j.mee.2008.04.046
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发表时间:
2008-10
影响因子:
2.3
通讯作者:
Ping Liu;Dong Xu;Zijiong Li;Bo Zhao;E. Kong;Yafei Zhang
中科院分区:
文献类型:
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作者:
Ping Liu;Dong Xu;Zijiong Li;Bo Zhao;E. Kong;Yafei Zhang