Leaky-Surface-Acoustic-Wave Properties on Reverse-Proton-Exchanged LiNbO3
Leaky-Surface-Acoustic-Wave Properties on Reverse-Proton-Exchanged LiNbO3
复制标题
反向质子交换 LiNbO3 的泄漏表面声波特性
DOI：
10.1143/jjap.48.07gg10
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
Y. Nakagawa
中科院分区：
文献类型：
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作者：
S. Kakio;H. Shimizu;Y. Nakagawa
具有弹性柔软性质的质子交换（PE）层可以通过反向质子交换（RPE）过程被埋入衬底中。与体LiNbO 3相比，具有类似于体LiNbO 3的性质的RPE层将防止耦合因子的劣化，并且掩埋PE层将有效地改变衬底的各向异性，并减少泄漏表面声波（LSAW）衰减。在这项研究中，首先，空气/散装LN/软化LN的层状结构被假定为旋转Y-X LN和LSAW衰减计算。通过控制软化LN的弹性常数，对于金属化表面，从Y轴给出零衰减的旋转角从64 °移动到5°，并且对于自由表面，衰减与体LN相比减小的旋转角急剧改变。接着，在41° Y-X LN上测量LSAW传播损耗PL。通过进行RPE工艺，金属化表面的PL从原始样品的0.036 dB/λ降低到0.015 dB/λ。还观察到自由表面的PL降低。
A proton-exchanged (PE) layer with an elastically soft property can be buried into a substrate by a reverse proton exchange (RPE) process. It is expected that an RPE layer with a property similar to that of bulk LiNbO3 will prevent the degradation of coupling factor, and that the buried PE layer will change the anisotropy of the substrate effectively and reduce the leaky surface acoustic wave (LSAW) attenuation as compared with bulk LN. In this study, first, a layered structure of air/bulk LN/softened LN was assumed for rotated Y–X LN and LSAW attenuation was calculated. By controlling the elastic constant of the softened LN, the rotation angle from the Y-axis giving zero attenuation shifted from 64 to 5° for a metallized surface, and the rotation angle at which the attenuation decreases as compared with bulk LN was drastically changed for a free surface. Next, the LSAW propagation loss PL was measured on 41° Y–X LN. The PL for the metallized surface was decreased by carrying out the RPE process from 0.036 dB/λ of a virgin sample to 0.015 dB/λ. The decrease in PL for the free surface was also observed.