Review of sticking coefficients and sorption capacities of gases on titanium films
Review of sticking coefficients and sorption capacities of gases on titanium films
复制标题
气体在钛膜上的粘附系数和吸附能力综述
DOI：
10.1116/1.568900
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发表时间：
1976
期刊：
影响因子：
--
通讯作者：
D. Harra
中科院分区：
文献类型：
--
作者：
D. Harra
使用钛阴极的钛升华泵或溅射离子泵的泵速是许多变量的函数，包括气体在钛膜上的粘附系数和吸附能力。因此，在采用这种泵送机构的真空系统中，粘附系数和吸附能力在确定各种气体种类在任何给定时间的分压方面起主要作用。然而，确定预期分压特性所需的粘附系数数据并不方便获得。对这方面的文献进行了综述，并对H2、D2、H2O、CO、N2、O2和CO2的数据进行了总结。这些结果和相关的信息的吸附机制进行了讨论。
The pumping speed of a titanium sublimation pump or a sputter‐ion pump using titanium cathodes is a function of many variables including the sticking coefficient and sorption capacity of gases on titanium films. Consequently, in vacuum systems employing such pumping mechanisms, the sticking coefficients and sorption capacities play a major role in determining the partial pressures at any given time of various gas species. However, the sticking coefficient data required to determine the partial pressure behavior to be expected is not conveniently available. The literature on this subject has been reviewed and the data for H2, D2, H2O, CO, N2, O2, and CO2 have been summarized. These results are presented and information related to the sorption mechanisms is discussed.