Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves
Self-supporting 3D printed flexible liquid metal electrodes for electrostatically microfluidic valves
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DOI：
10.1088/1361-6439/ac2baf
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发表时间：
2021-11-01
影响因子：
2.3
通讯作者：
Sun, Daoheng
中科院分区：
文献类型：
--
作者：
Chen, Xiaojun;Lian, Haishan;Sun, Daoheng
对便携式和可穿戴电子产品的需求不断增长，导致对柔性电极的兴趣增加。三维柔性电极结构是实现柔性电子器件广泛应用的关键。然而，现有的柔性电极制造方法大多局限于制作1D和2D电极结构，难以在一个器件中同时完成基板-电极双柔性结构的制备。在这里，我们提出了一种双模式3D打印系统，可以实现柔性3D电子器件的一步集成制造，该柔性3D电子器件具有柔性膜基板和液态金属电极。纳米纤维膜和液态金属材料具有双重柔性结构，增加了电极的顺应性性能。作为概念验证，我们展示了3D柔性电极在静电驱动微流体阀中的应用。在8 kV的驱动电压下，可使可动膜片的位移大于40 μ m，实现了微阀的开关控制。该技术具有低成本和集成的优点，展示了这种打印3D电极的前景，使3D柔性电极器件能够用于微流体，软件机器人和可穿戴电子设备。
The growing demand for portable and wearable electronics has led to an increased interest in flexible electrodes. The 3D flexible electrode structure is the key to realising the wide application of diversified flexible electronic devices. However, most of the existing flexible electrode manufacturing methods is restricted to fabricating 1D and 2D electrode structures, and it is difficult to simultaneously complete the preparation of the substrate-electrode double-flexible structure in one device. Here, we propose a dual-mode 3D printing system that can realise the one-step integrated manufacturing of flexible 3D electronic devices with nanofiber membrane substrates and liquid metal electrodes. Nanofiber membranes and liquid metal materials have a double flexible structure that increases the compliance performance of the electrode. As a proof of concept, we demonstrated the application of 3D flexible electrodes in electrostatically driven microfluidic valves. The 8 kV driving voltage can make the displacement of the movable membrane more than 40 mu m, and realise the on-off control of the microvalve. This technology has the advantages of low cost and integration, demonstrating the promising potential of such printed 3D electrodes to enable 3D flexible electrode devices to be used in microfluidics, software robots and wearable electronic devices.