Spatial and phase resolution in electron microscopy
Spatial and phase resolution in electron microscopy
复制标题
电子显微镜中的空间和相位分辨率
DOI：
10.1093/jmicro/dfac045
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发表时间：
2023
期刊：
影响因子：
1.8
通讯作者：
R. Ishikawa S. Morishita T. Tanigaki N. Shibata Y. Ikuhara
中科院分区：
文献类型：
--
作者：
安達天規;西田直之;永瀬 隆;小林隆史;内藤裕義;R. Ishikawa S. Morishita T. Tanigaki N. Shibata Y. Ikuhara
随着电子光学中像差校正器的发明，电子显微镜的空间分辨率得到了逐步提高，现在已经达到了亚50 μ m的范围，原子分辨率电子显微镜已经成为研究材料和器件中原子结构的通用工具。此外，电子显微镜中的相位分辨率也取得了显著进展，原子尺度的电磁场可视化已经成为可能，这对理解材料的物理和化学性质有很大贡献。电子显微镜社会随着空间和相位分辨率的提高而发展，因此，我们必须不断开发新的硬件，软件和方法来提高这些分辨率。在这里，我们回顾了电子显微镜的空间和相位分辨率的历史进展，在这里我们澄清了这些分辨率的定义。我们还讨论了电子显微镜的未来目标。
With the invention of the aberration corrector in electron optics, the spatial resolution in electron microscopy has progressively improved and has now reached the sub-50-pm regime, and atomic-resolution electron microscopy has become a versatile tool for investigating the atomic structures in materials and devices. Furthermore, the phase resolution in electron microscopy also exhibits outstanding progress, and it has become possible to visualize electromagnetic fields at atomic dimensions, which strongly contributes to understanding the physical and chemical properties of materials. The electron microscopy society has grown with the improvements in spatial and phase resolutions, and hence, we must continuously develop new hardware, software and methodologies to boost these resolutions. Here, we review the historical progress of spatial and phase resolutions in electron microscopy, where we clarify the definition of these resolutions. We also discuss the future targets in electron microscopy.