Broadband moth-eye antireflection coatings on silicon
Broadband moth-eye antireflection coatings on silicon
复制标题
DOI：
10.1063/1.2870080
复制
发表时间：
2008-02-11
影响因子：
4
通讯作者：
Jiang, Bin
中科院分区：
文献类型：
--
作者：
Sun, Chih-Hung;Jiang, Peng;Jiang, Bin
We report a bioinspired templating technique for fabricating broadband antireflection coatings that mimic antireflective moth eyes. Wafer-scale, subwavelength-structured nipple arrays are directly patterned on silicon using spin-coated silica colloidal monolayers as etching masks. The templated gratings exhibit excellent broadband antireflection properties and the normal-incidence specular reflection matches with the theoretical prediction using a rigorous coupled-wave analysis (RCWA) model. We further demonstrate that two common simulation methods, RCWA and thin-film multilayer models, generate almost identical prediction for the templated nipple arrays. This simple bottom-up technique is compatible with standard microfabrication, promising for reducing the manufacturing cost of crystalline silicon solar cells. (c) 2008 American Institute of Physics.
