RF compensation of double Langmuir probes: modelling and experiment
RF compensation of double Langmuir probes: modelling and experiment
复制标题
双 Langmuir 探头的射频补偿：建模和实验
DOI：
10.1088/0963-0252/24/3/035024
复制
发表时间：
2015
影响因子：
3.8
通讯作者：
B. Blackwell
中科院分区：
文献类型：
--
作者：
J. Caneses;B. Blackwell
建立了一个描述驱动浮动探针物理特性的分析模型，用于模拟双朗缪尔探针（DLP）技术的射频补偿。该模型基于Braithwaite的工作[]中描述的RF自偏置效应理论，我们将其扩展到包括时间分辨行为。这项工作的主要贡献是允许定量测定的固有RF补偿的DLP在一个给定的RF放电。利用这些思想，我们讨论了射频补偿DLP的设计。这些想法的实验验证和DLP测量的RF整流的影响进行了讨论。使用RF整流DLP的实验结果表明：（1）当鞘层厚度效应很重要时，离子密度的高估与RF整流水平成正比，并表明（2）电子温度测量仅受到微弱影响。
An analytical model describing the physics of driven floating probes has been developed to model the RF compensation of the double langmuir probe (DLP) technique. The model is based on the theory of the RF self-bias effect as described in Braithwaite’s work [], which we extend to include time-resolved behaviour. The main contribution of this work is to allow quantitative determination of the intrinsic RF compensation of a DLP in a given RF discharge. Using these ideas, we discuss the design of RF compensated DLPs. Experimental validation for these ideas is presented and the effects of RF rectification on DLP measurements are discussed. Experimental results using RF rectified DLPs indicate that (1) whenever sheath thickness effects are important overestimation of the ion density is proportional to the level of RF rectification and suggest that (2) the electron temperature measurement is only weakly affected.