A valve-less diffuser micropump for microfluidic analytical systems
A valve-less diffuser micropump for microfluidic analytical systems
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DOI：
10.1016/s0925-4005(00)00644-4
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发表时间：
2001-02-10
影响因子：
8.4
通讯作者：
Stemme, G
中科院分区：
文献类型：
--
作者：
Andersson, H;van der Wijngaart, W;Stemme, G
无阀微泵在生物化学中的适用性已经被证明。在各种生物化学方法中遇到的对其他微型泵有问题的流体已经以良好的性能被泵送。该泵是作为一个硅玻璃堆栈与一个新的过程，涉及三个后续的深反应离子蚀刻步骤。无阀扩散泵的一些主要优点是没有运动部件（不包括泵隔膜）、不复杂的平面设计以及在压头和流量方面的高泵性能。此外，微型泵是自吸的，并且对泵送介质中存在的颗粒和气泡不敏感。结果表明，无阀微泵可成功地泵送粘度范围为0.001-0.9 N s/m2的流体。微型泵对泵送介质的密度、离子强度或pH不敏感。还证明了含有不同尺寸珠粒的溶液的有效泵送。活细胞被泵送而不会引起细胞损伤，并且在泵室内没有发现细胞粘附。(C)2001 Elsevier Science B. V.保留所有权利。
The suitability of valve-less micropumps in biochemistry has been shown. Fluids encountered in various biochemical methods that are problematic for other micropumps have been pumped with good performance. The pump is fabricated as a silicon-glass stack with a new process involving three subsequent deep reactive ion etching steps. Some of the main advantages of the valve-less diffuser pump are the absence of moving parts (excluding the pump diaphragm), the uncomplicated planar design, and high pump performance in terms of pressure head and flow rare. In addition, the micropump is self-priming and insensitive to particles and bubbles present in the pumped media. The results show that the valve-less micropump successfully pumps fluids within the viscosity range of 0.001-0.9 N s/m(2). The micropump is not sensitive to the density, ionic strength, or pH of the pumped media. Effective pumping of solutions containing beads of different sizes was also demonstrated. Living cells were pumped without inducing cell damage and no cell adhesion within the pump chamber was found. No valve-less micropump has previously been reported to pump such a wide variety of fluids. (C) 2001 Elsevier Science B.V. All rights reserved.