Visualization of beams from ionic liquid ion sources for focused ion beam applications
Visualization of beams from ionic liquid ion sources for focused ion beam applications
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用于聚焦离子束应用的离子液体离子源束流的可视化
DOI：
10.1116/1.4745187
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
P. Lozano
中科院分区：
文献类型：
--
作者：
C. Perez;P. Lozano
离子液体离子源（ILIS）具有与聚焦离子束（FIB）操作所需的液态金属离子源相同的特性，如纯离子发射和低能量扩散。这些源在较低的电流，室温下工作，并且能够从大量的离子液体中产生正离子和负离子。利用光束可视化系统表征了外加电压对液体EMI-BF4（1-乙基3-甲基咪唑四氟硼酸盐）光致发光器件发射光束的影响。随着外加电压的增加，源从单束发射转变为多束发射。可视化工具还用于确定从ILIS发射的光束中包含的中性粒子居群的空间分布。簇离子在飞行过程中会断裂，产生新的离子和中性粒子。这种中性人口可以是高能量的，并且可能对不希望对目标充电的材料处理应用感兴趣。F……
Ionic liquid ion sources (ILIS) share qualities with liquid metal ion sources necessary for focused ion beams (FIB) operation, such as pure ion emission and low energy spreads. These sources work at lower currents, room temperature, and are able to produce both positive and negative ions from a large number of ionic liquids. The influence of the applied voltage on the beam emitted from the ILIS based on the liquid EMI-BF4 (1-ethyl 3-methyl imidazolium tetrafluoroborate) is characterized by using a beam visualization system. As the applied voltage is increased, the source transitions from single to multiple beam emission. The visualization tool is also used to determine the spatial distribution of the neutral particle population contained within the beam emitted from ILIS. Cluster ions can break during flight, yielding a new ion and neutral particles. This neutral population can be highly energetic, and might be of interest for material treatment applications where charging of targets is undesirable. For F...