Progress in fabrication of microcalorimeter arrays: X-ray absorbers and high-density stripline wiring
Progress in fabrication of microcalorimeter arrays: X-ray absorbers and high-density stripline wiring
复制标题
微热量计阵列制造进展：X射线吸收器和高密度带状线布线
DOI：
10.1016/j.nima.2005.12.032
复制
发表时间：
2006
影响因子：
1.4
通讯作者：
J. Kuur
中科院分区：
文献类型：
--
作者：
M. Bruijn;M. Ridder;E. Krouwer;H. Hoevers;P. Korte;J. Kuur
我们报告的微热量计阵列的制造技术的进展，将用于未来的X射线光谱空间任务。通过蒸发和溅射沉积技术，进行了形成高填充因子、蘑菇状Bi吸收体的优化研究。对吸收体的电性能、机械性能和热性能进行了表征。我们展示了用低电感带状线布线250μm间距、32×32像素阵列的可行性。原型阵列的设计已经完成，制造正在进行中。
We report on advances in the fabrication technology of an array of microcalorimeters, to be used in future X-ray spectroscopic space missions. An optimization study was done to form high packing factor, mushroom-shaped, Bi absorbers by evaporation and sputter deposition techniques. The electrical, mechanical and thermal properties of the absorbers were characterized. We show the feasibility of wiring a 250μm pitch, 32×32 pixel array with low-inductance striplines. A design for a prototype array has been made and fabrication is in progress.