NEAR-FIELD OPTICAL MICROSCOPE USING A SILICON-NITRIDE PROBE
NEAR-FIELD OPTICAL MICROSCOPE USING A SILICON-NITRIDE PROBE
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DOI：
10.1063/1.108933
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发表时间：
1993-02-01
影响因子：
4
通讯作者：
BOLGER, B
中科院分区：
文献类型：
--
作者：
VANHULST, NF;MOERS, MHP;BOLGER, B
介绍了另一种近场光学显微镜的操作。该显微镜使用带有集成悬臂的微加工氮化硅探针，最初是为力显微镜开发的。悬臂梁允许在任意表面上进行常规近距离接触近场成像，而不会损坏尖端。已经观察到粘附力对倏逝波耦合的影响。展示了横向分辨率约为 50 nm 的图像，并与原子力图像进行了比较。可以使用集成的传统光学显微镜选择特定的样品区域。
Operation of an alternative near-field optical microscope is presented. The microscope uses a microfabricated silicon-nitride probe with integrated cantilever, as originally developed for force microscopy. The cantilever allows routine close contact near-field imaging on arbitrary surfaces without tip destruction. The effect of adhesion forces on the coupling to the evanescent wave has been observed. Images with a lateral resolution of about 50 nm are presented and compared with atomic force images. A specific sample area can be selected using an integrated conventional light microscope.