Effect of Ion Bombardment on Microstructures of Carbon Nanotubes Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures
Effect of Ion Bombardment on Microstructures of Carbon Nanotubes Grown by Electron Cyclotron Resonance Chemical Vapor Deposition at Low Temperatures
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离子轰击对低温电子回旋共振化学气相沉积生长碳纳米管微结构的影响
DOI：
10.1143/jjap.42.1410
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发表时间：
2003
影响因子：
1.5
通讯作者：
J. M. Kim
中科院分区：
文献类型：
--
作者：
Y. Woo;I. Han;Youngjun Park;Ha;J. Jung;N. Lee;D. Jeon;J. M. Kim
垂直排列的多壁碳纳米管（MWNT）是通过电子回旋共振化学气相沉积在镀镍玻璃基板上在低至 400°C 的温度下合成的。通过射频 (RF) 等离子体对基板施加负自偏压，以离子轰击生长表面。据观察，射频偏压对基底的离子轰击对碳纳米管的生长及其形貌有很大影响。高分辨率透射电子显微镜显示，合成纳米管中石墨烯层的有序程度随着射频偏压而增加。拉曼光谱分析表明，在较大的负偏压下，MWNT 石墨烯层内的 C-C 键缩短，这似乎是由于离子轰击从 MWNT 中去除键合氢所致。
Vertically aligned multi walled carbon nanotubes (MWNTs) were synthesized by electron cyclotron resonance chemical vapor deposition on Ni-coated glass substrates at temperatures as low as 400°C. Negative self-biases were applied to the substrates by radio-frequency (RF) plasma for ion bombardment of the growing surface. It was observed that ion bombardment by RF biasing to the substrates had a great effect upon the growth of carbon nanotubes and their morphologies. High-resolution transmission electron microscopy revealed that the degree of ordering of graphene layers in the synthesized nanotubes increased with RF bias. Raman spectroscopic analyses indicated that the shortening of C–C bonds within the graphene layers of the MWNTs occurred at larger negative biases, which seemed to result from removal of bonded hydrogen from the MWNTs by ion bombardment.