Liquid sensor probe using reflecting SH-SAW delay line
Liquid sensor probe using reflecting SH-SAW delay line
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DOI：
10.1016/s0925-4005(03)00103-5
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发表时间：
2003-06-01
影响因子：
8.4
通讯作者：
Miyazaki, T
中科院分区：
文献类型：
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作者：
Nomura, T;Saitoh, A;Miyazaki, T
利用SH-SAW器件设计了一种新型液体传感探头。剪切水平模式声表面波（SH-SAW）具有在基片自由边缘完全反射的独特特性。在36 ° YX LiTaO 3上激发SH-SAW，并利用基片的直角边反射SAW。在基片上制作了多通道反射式声表面波延迟线。从边缘反射的SH-SAW的相位和幅度都被测量为传感器响应。进行了几个实验，以验证边缘反射型SAW传感器在液相中。传感系统的配置也建议为传感器探头的有效操作。本文介绍了一种用于精确测量反射波相位特性和检测多通道声表面波传感器探头输出信号的电路系统。(C)2003 Elsevier Science B. V.保留所有权利。
A new liquid sensor probe has been designed by using SH-SAW device. Shear horizontal mode surface acoustic wave (SH-SAW) has a unique characteristic of complete reflection at the free edges of the substrate. The SH-SAW are excited on a 36degrees YX LiTaO3 and the right angle edge of the substrate has been used to reflect the SAW. Multi-channel reflecting SAW delay lines were constructed on the substrate. Both the phase and amplitude of the SH-SAW reflected from the edge were measured as a sensor response. Several experiments were performed to verify the edge reflection type SAW sensor in liquid phase. A sensing system configuration is also suggested for the effective operation of the sensor probe. An electronic circuits system for accurately measuring the phase characteristics of the reflected wave and for detecting the output from the multi-channel SAW sensor probe was shown. (C) 2003 Elsevier Science B.V. All rights reserved.