Microinjection molding of light-guided plates using LIGA-like fabricated stampers
Microinjection molding of light-guided plates using LIGA-like fabricated stampers
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DOI：
10.1002/app.34372
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发表时间：
2011-12
影响因子：
3
通讯作者：
Ming‐Shyan Huang;H. Ku
中科院分区：
文献类型：
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作者：
Ming‐Shyan Huang;H. Ku
本研究探讨微射出成型的导光板（LGP），使用光刻，电镀，和成型（LIGA）一样制造的压模。3.5英寸LGP具有薄壁（0.76 mm）和微米尺寸特征的截棱锥棱镜（70 μm宽和38.3 μm深，顶角为70.5°）和V形槽（9.8 μm深）。采用各向异性湿法腐蚀绝缘硅片与电铸相结合的方法，精确地制造出用于LGP注塑的压模。LGP必须具有多个质量特性，例如对微特征的良好复制效果和板的平坦度。本研究采用田口法与灰色关联分析法，对微射出成型参数进行最佳化。各种IM参数，包括模具温度，熔体温度，保压压力和注射速度，被认为是。实验结果表明，模具温度和保压压力的性能占主导地位。灰色关联分析和田口法可用于确定LGP成型的最佳工艺参数。© 2011 Wiley Periodicals，Inc.应用聚合物科学杂志，2011年
This investigation explores the microinjection molding of light-guided plates (LGPs) using lithography, electroplating, and molding (LIGA)-like fabricated stampers. The 3.5-in. LGP has a thin wall (0.76 mm) and micron-sized features of truncated pyramidal prisms (70 μm wide and 38.3 μm deep, with a vertex angle of 70.5°) and v-grooves (9.8 μm deep). Stampers for LGP injection molding (IM) are fabricated precisely by combining the anisotropic wet etching of silicon-on-insulation wafers with electroforming. LGPs must have multiple quality characteristics, such as good replication effects on microfeatures and flatness of the plate. In this study, the Taguchi method and gray relational analysis are adopted to optimize the microinjection molding parameters. Various IM parameters, including mold temperature, melt temperature, holding pressure, and injection speed, are considered. Experimental results demonstrate that mold temperature and holding pressure dominate the performance. Gray relational analysis and the Taguchi method can be used to determine the optimal process parameters for LGP molding. © 2011 Wiley Periodicals, Inc. J Appl Polym Sci, 2011