Optical properties of amorphous Ba0.7Sr0.3TiO3 thin films obtained by metal organic decomposition technique
Optical properties of amorphous Ba0.7Sr0.3TiO3 thin films obtained by metal organic decomposition technique
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DOI：
10.1117/12.843420
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发表时间：
2006-12
期刊：
影响因子：
--
通讯作者：
Fei Qiu;Zhimou Xu
中科院分区：
文献类型：
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作者：
Fei Qiu;Zhimou Xu
本研究采用金属有机分解(MOD)-旋涂法制备了Ba0.7Sr0.3TiO3(BST0.7)非晶态薄膜。测量了熔融石英衬底上非晶态BST0.7薄膜在190~900 nm波段的光学透过率光谱。薄膜对330 nm以上的波长具有很高的透过率，在330 nm处透过率迅速下降，截止波长在260 nm左右。此外，我们还报道了在SiO_2热氧化层厚度为1.65μm的Si衬底上制作的具有90°弯曲结构的非晶态BST_(0.7)薄膜槽埋型光波导。介绍了非晶态BST0.7光波导的设计、制作和光学损耗。采用金属有机分解(MOD)旋涂法在SiO_2/Si衬底上生长了非晶态BST0.7薄膜。在632.8 nm波长下，5和10μm宽的光传输损耗分别为12.8db/cm和9.4db/cm。在双角反射镜结构的基础上，设计了90°弯曲微米级结构。在波长632.8 nm处，5和10μm宽的光波导的弯曲损耗分别为1.2d B和0.9d B。非晶态BST0.7薄膜不仅有望用于单片OEIC的无源光学互连，还有望用于硅片上的有源光波导器件。
In this study, the amorphous Ba0.7Sr0.3TiO3 (BST0.7) thin films were grown onto fused quartz and silicon substrates at low temperature by using a metal organic decomposition (MOD)-spin-coating procedure. The optical transmittance spectrum of amorphous BST0.7 thin films on fused quartz substrates has been recorded in the wavelength range 190~900 nm. The films were highly transparent for wavelengths longer than 330 nm; the transmission drops rapidly at 330 nm, and the cutoff wavelength occurs at about 260 nm. In addition, we also report the amorphous BST0.7 thin film groove-buried type waveguides with 90° bent structure fabricated on Si substrates with 1.65 μm thick SiO2 thermal oxide layer. The design, fabrication and optical losses of amorphous BST0.7 optical waveguides were presented. The amorphous BST0.7 thin films were grown onto the SiO2/Si substrates by using a metal organic decomposition (MOD)-spin-coating procedure. The optical propagation losses were about 12.8 and 9.4 dB/cm respectively for the 5 and 10 μm wide waveguides at the wavelength of 632.8 nm. The 90° bent structures with a small curvature of micrometers were designed on the basis of a double corner mirror structure. The bend losses were about 1.2 and 0.9 dB respectively for 5 and 10 μm wide waveguides at the wavelength of 632.8 nm. It is expected for amorphous BST0.7 thin films to be used not only in the passive optical interconnection in monolithic OEICs but also in active waveguide devices on the Si chip.