An abuttable CCD imager for visible and X-ray focal plane arrays
An abuttable CCD imager for visible and X-ray focal plane arrays
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用于可见光和 X 射线焦平面阵列的可对接 CCD 成像仪
DOI：
10.1109/isscc.1989.48196
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发表时间：
1989
期刊：
影响因子：
--
通讯作者：
J. Doty
中科院分区：
文献类型：
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作者：
Barry E. Burke;R. Mountain;David C. Harrison;J. Reinold;C. Doherty;G. Ricker;M. Bautz;J. Doty
近距离CCD（电荷耦合器件）的大型多芯片阵列需要用于可见波段的监视应用和X射线天文学任务，如高级X射线天体物理学设施和ASTRO-D卫星。研制了一种420 × 420象素的帧转移CCD成象器，它可以与其它成象器在三个侧面重叠，从而构成2 × N片的阵列。采用三相三多晶硅埋沟工艺，芯片尺寸为12 mm*20 mm。该阵列在低电荷水平下提供低噪声读出电路和高电荷传输效率，这是上述两种应用的关键要求。该设备也被证明是适合作为一个软X射线成像仪在光谱模式下操作。<<ETX>>
Large multichip arrays for close-abutted CCDs (charged-coupled devices) are needed for surveillance applications in the visible band and for X-ray astronomy missions such as the Advanced X-ray Astrophysics Facility and the ASTRO-D satellite. A 420*420 pixel frame-transfer CCD imager which is designed to be abutted to other imagers on three sides so that arrays of 2*N chips can be constructed has been developed. A three-phase, triple-poly, buried-channel process is used, and the die size is 12 mm*20 mm. The arrays provide low-noise readout circuitry and high charge-transfer efficiency at low charge levels, critical requirements for both of the above applications. The device has also been shown to be suitable as a soft X-ray imager operating in a spectroscopic mode.<<ETX>>