Highly sensitive ZnO ozone detectors at room temperature
Highly sensitive ZnO ozone detectors at room temperature
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DOI：
10.1143/jjap.42.l435
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发表时间：
2003-04-15
期刊：
影响因子：
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通讯作者：
Kiriakidis, G
中科院分区：
文献类型：
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作者：
Bender, M;Fortunato, E;Kiriakidis, G
在这封信中，我们比较了通过喷雾热解、直流和射频沉积的本征氧化锌 (ZnO) 薄膜的室温臭氧传感特性。磁控溅射。当薄膜结构由纳米微晶构成时，它们的传感器响应超过 8 个数量级。这些初步结果清楚地表明，这些薄膜有可能用于室温下的臭氧检测。
In this letter we compare the room temperature ozone sensing properties of intrinsic zinc oxide (ZnO) thin films deposited by spray pyrolysis, dc and r.f. magnetron sputtering. Their sensor response exceeds 8 orders of magnitude when the film structure is constituted by nanocrystallites. These preliminary results clearly demonstrate that the films could be potentially used for ozone detection at room temperature.