A 2.74pJ/conversion 0.0018mm2 Temperature Sensor with On-chip Gain and Offset Correction

A 2.74pJ/conversion 0.0018mm2 Temperature Sensor with On-chip Gain and Offset Correction
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具有片上增益和偏移校正的 2.74pJ/转换 0.0018mm2 温度传感器

DOI:
10.1109/esscirc55480.2022.9911364
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发表时间:
2022
期刊:
ESSCIRC 2022- IEEE 48th European Solid State Circuits Conference (ESSCIRC)
影响因子:
--
通讯作者:
P. Harpe
P. Harpe
中科院分区:
--
文献类型:
--
作者:
Yuting Shen;Mariska van der Struijk;Kevin Pelzers;Hanyue Li;E. Cantatore;P. Harpe

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本文介绍了一种适用于低功耗系统的65 nm CMOS动态温度传感器,具有片内模拟增益和失调校正功能。通过移位N位ADC的复位相位,实现了范围为$\pm 2^{(N-1)}$ LSB的失调校正。引入微调电容,将失调校正精度提高到0.5LSB。通过增加可编程寄生电容,可以补偿高达6.3%的增益误差。由于提出了模拟校正技术,增益误差降低至0.73%,失调降低至0.5LSB。该传感器每次转换消耗2.74pJ,仅占用0.0018 mm 2的面积,包括额外的校正技术。它的RMS分辨率为0.47K,导致FoM为0.6 pJ.K2。
This paper presents a dynamic temperature sensor in 65nm CMOS with on-chip analog gain and offset correction for low power systems. By shifting the reset phase of the N-bit ADC, offset correction with a range of $\pm 2^{(N-1)}$ LSB is realized. Fine tuning capacitors are introduced to improve the offset correction accuracy to 0.5LSB. By adding programmable parasitic capacitors, gain errors up to 6.3% can be compensated. Thanks to the proposed analog correction techniques, the gain errors are reduced to 0.73% and the offsets are reduced to 0.5LSB. This sensor consumes 2.74pJ per conversion and only occupies an area of 0.0018 mm2 including the extra correction techniques. It has an RMS resolution of 0.47K, leading to a FoM of 0.6 pJ.K2.