The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes
The back-diffusion effect of air on the discharge characteristics of atmospheric-pressure radio-frequency glow discharges using bare metal electrodes
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DOI：
10.1088/0963-0252/16/2/011
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发表时间：
2007-05
影响因子：
3.8
通讯作者：
Wenting Sun;T. Liang;Hua-Bo Wang;He-ping Li;Cheng-Yu Bao
中科院分区：
文献类型：
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作者：
Wenting Sun;T. Liang;Hua-Bo Wang;He-ping Li;Cheng-Yu Bao
采用裸金属电极的射频大气压辉光放电等离子体在等离子体辅助刻蚀、沉积、表面处理、消毒、灭菌等领域具有广阔的前景。本文介绍了射频大气压辉光放电等离子体的放电特性，包括击穿电压和维持稳定均匀α模式放电的放电电压。实验是将自制的平面型等离子体发生器分别置于大气和真空室中，以氦气作为主要的等离子体形成气体。当放电过程发生在环境中时，尤其是当等离子体工作气体流量较低时，实验测量表明，随着等离子体工作气体流量的增加，击穿电压明显降低的原因是空气在大气中的反向扩散效应，而不是气体流量。对不同等离子体工作气体或气体混合物的放电特性，如发光结构、等离子体中化学活性物质的浓度和分布等的进一步研究需要在未来的工作中进行。
Radio-frequency (RF), atmospheric-pressure glow discharge (APGD) plasmas using bare metal electrodes have promising prospects in the fields of plasma-aided etching, deposition, surface treatment, disinfection, sterilization, etc. In this paper, the discharge characteristics, including the breakdown voltage and the discharge voltage for sustaining a stable and uniform α mode discharge of the RF APGD plasmas are presented. The experiments are conducted by placing the home-made planar-type plasma generator in ambient and in a vacuum chamber, respectively, with helium as the primary plasma-forming gas. When the discharge processes occur in ambient, particularly for the lower plasma-working gas flow rates, the experimental measurements show that it is the back-diffusion effect of air in atmosphere, instead of the flow rate of the gas, that results in the obvious decrease in the breakdown voltage with increasing plasma-working gas flow rate. Further studies on the discharge characteristics, e.g. the luminous structures, the concentrations and distributions of chemically active species in plasmas, with different plasma-working gases or gas mixtures need to be conducted in future work.