Deposition of Ultra Fine Particles Using a Gas Jet

Deposition of Ultra Fine Particles Using a Gas Jet
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使用气体射流沉积超细颗粒

DOI：
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发表时间：
1984
期刊：
影响因子：
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通讯作者：
C. Hayashi
C. Hayashi
中科院分区：
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文献类型：
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作者：
S. Kashū;E. Fuchita;T. Manabe;C. Hayashi

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使用气体射流转移和沉积金属或陶瓷UFP已进行了研究。单个颗粒的直径小于0.1µm，由所谓的气体蒸发法产生。UFP的沉积可以通过在固体表面上制备与UFP碰撞的气流来实现。不同的金属或陶瓷均匀分布的沉积，无论比重，也可以。类似的技术也可用于冷冻气体UFP（例如CO2）。二氧化碳UFP暴风雪可以去除光刻胶而不会污染或损坏基材（涂在玻璃上的薄膜铬）。转移和沉积技术可作为UFP工业应用的基本处理方法。
Use of a gas jet for the transfer and deposition of metal or ceramic UFP has been studied. Individual particles having a diameter of less than 0.1 µm, are produced by the so-called gas evaporation method. Deposition of the UFP can be made by preparing a colliding gas flow with UFP on a solid surface. Uniformly distributed deposition of different metals or ceramics, regardless of specific gravity, can also be made. A similar technique is also usable with frozen gas UFP (CO2 for example). A CO2 UFP blizzard can remove photoresist without contamination or damage to a substrate (thin film chromium coated on glass). The transfer and deposit technique could be a basic method for handling UFP for industrial application.