Design and evaluation of large area strip sensor prototypes for the ATLAS Inner Tracker detector
Design and evaluation of large area strip sensor prototypes for the ATLAS Inner Tracker detector
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DOI：
10.1016/j.nima.2020.164536
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发表时间：
2020-11-21
影响因子：
1.4
通讯作者：
Unno, Y.
中科院分区：
文献类型：
--
作者：
Fernandez-Tejero, J.;Bartl, U.;Unno, Y.
ATLAS社区正面临着为高光度大型强子对撞机生产升级的硅条内跟踪器之前的最后阶段。为了评估不同铸造厂制造满足ATLAS规范的大面积硅片传感器的能力，进行了广泛的市场调查。半导体制造公司英飞凌科技股份有限公司和滨松光电子公司是进入新设备生产评估最后阶段的两家铸造厂之一。英飞凌参与的完整晶片布局原型ATLAS17LS-IFX是使用最新开发的基于Python的自动布局生成工具设计的，该工具能够根据几个几何和工艺输入参数快速设计不同特性和尺寸的传感器。这项工作介绍了版图设计过程和新的英飞凌大面积传感器在质子和中子辐照前后的评估结果，直到未来ATLAS探测器内层的预期通量。
The ATLAS community is facing the last stages prior to the production of the upgraded silicon strip Inner Tracker for the High-Luminosity Large Hadron Collider. An extensive Market Survey was carried out in order to evaluate the capability of different foundries to fabricate large area silicon strip sensors, satisfying the ATLAS specifications. The semiconductor manufacturing company, Infineon Technologies AG, was one of the two foundries, along with Hamamatsu Photonics K.K., that reached the last stage of the evaluation for the production of the new devices. The full prototype wafer layout for the participation of Infineon, called ATLAS17LS-IFX, was designed using a newly developed Python-based Automatic Layout Generation Tool, able to rapidly design sensors with different characteristics and dimensions based on a few geometrical and technological input parameters. This work presents the layout design process and the results obtained from the evaluation of the new Infineon large area sensors before and after proton and neutron irradiations, up to fluences expected in the inner layers of the future ATLAS detector.