Variable refractive index polymer thin films prepared by plasma copolymerization

Variable refractive index polymer thin films prepared by plasma copolymerization
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DOI:
10.1021/cm035226q
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发表时间:
2004-04-06
影响因子:
8.6
通讯作者:
Bunning, TJ
Bunning, TJ
中科院分区:
材料科学2区
文献类型:
--
作者:
Jiang, H;O'Neill, K;Bunning, TJ

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我们已经开发了等离子体共聚技术来制造光子薄膜与两个(或更多)的单体,其组成可以控制,以操纵薄膜的光学性能。椭圆偏振光谱证实,通过改变单体的进料比(苯和八氟环丁烷),薄膜的折射率之间的均聚膜的纳米厚度范围内,可以制造。使用FTIR和XPS的共聚膜的化学结构的光谱分析证实了作为单体进料比的函数的化学组成的非线性变化。然而,这些膜的折射率随膜组成(表征为氟/碳比)线性变化。通过在不同折射率的基底上制备多层增透膜,可以方便地控制光学厚度。设计和实验光谱之间的非常好的协议。这种生长过程创造了一种新的方法来制备纳米范围内的梯度折射率(GRIN)薄膜,其Deltan大于0.3,并且具有良好的控制性能。
We have developed plasma copolymerization techniques to fabricate photonic films with two (or more) monomers, whose composition can be controlled to manipulate the optical properties of the films. Spectroscopic ellipsometry confirmed that by changing monomer feed ratios (benzene and octafluorocyclobutane), films in the nanometer thickness range with refractive indices between those of the homopolymerized films could be fabricated. Spectroscopic analysis of the chemical structure of the copolymerized films using FTIR and XPS confirmed a nonlinear variation of chemical composition as a function of the monomer feed ratios. However, the refractive index of these films changes linearly with the film composition (characterized as the fluorine/carbon ratio). Facile control of optical thickness was demonstrated by fabricating multilayer antireflecting (AR) coatings on substrates of differing refractive indices. Very good agreement between the design and experimental spectra was obtained. This growth process creates a new way to prepare gradient-index (GRIN) films in the nanometer range, with a Deltan greater than 0.3 and with well-controlled properties.