Properties of Love waves in a piezoelectric layered structure with a viscoelastic guiding layer

Properties of Love waves in a piezoelectric layered structure with a viscoelastic guiding layer
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具有粘弹性引导层的压电层状结构中拉夫波的特性

DOI:
10.1088/0964-1726/22/12/125034
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发表时间:
2013-12-01
影响因子:
4.1
通讯作者:
He, Shitang
He, Shitang
中科院分区:
材料科学3区
文献类型:
--
作者:
Liu, Jiansheng;Wang, Lijun;He, Shitang

文献摘要

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本文提出了一种分析压电基片上粘弹性导层结构中Love波的理论方法。本文将压电Love波在弹性层状结构中传播的频散方程应用于粘弹性层状结构的分析。引入Maxwell-Weichert模型来描述聚合物材料的剪切刚度。数值计算采用牛顿法。压电弹性Love波的色散方程被证明适用于求解压电基片上的粘弹性层结构。理论结果表明,Love波的传播速度主要取决于波导层的剪切刚度,而传播损耗与波导层的粘性近似成正比。对制作在ST-90 ° X石英衬底上的Love波延迟线进行了详细的实验研究,并覆盖了不同厚度的SU-8波导层。计算和测量的传播速度都存在由导向层粘性引起的尾翘现象。勒夫波延迟线插入损耗的计算值与实测值吻合较好。本文的方法和结果对粘弹性引导层Love波传感器的设计具有一定的参考价值。
A theoretical method is developed for analyzing Love waves in a structure with a viscoelastic guiding layer bounded on a piezoelectric substrate. The dispersion equation previously derived for piezoelectric Love waves propagating in the layered structure with an elastic layer is adopted for analyzing a structure with a viscoelastic layer. A Maxwell-Weichert model is introduced to describe the shear stiffness of a polymeric material. Newton's method is employed for the numerical calculation. The dispersion equation for piezoelectric-elastic Love waves is proved suitable for solving a structure with a viscoelastic layer on a piezoelectric substrate. The theoretical results indicate that the propagation velocity of the Love wave is mainly decided by the shear stiffness of the guiding layer, whereas the propagation loss is approximately proportional to its viscosity. A detailed experimental study was conducted on a Love wave delay line fabricated on an ST-90 degrees X quartz substrate and overlaid with various thicknesses of SU-8 guiding layers. A tail-raising caused by the viscosity of the guiding layer existed in both the calculated and the measured propagation velocities. The calculated insertion loss of the Love wave delay lines was in good agreement with the measured results. The method and the results presented in this paper are beneficial to the design of Love wave sensors with a viscoelastic guiding layer.