Fabrication Techniques for Multilayer Matalization and Patterning, and Surface Mountings of Components on Cyrindrical Substrates for Tube-Shaped Micro-Tools
Fabrication Techniques for Multilayer Matalization and Patterning, and Surface Mountings of Components on Cyrindrical Substrates for Tube-Shaped Micro-Tools
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管状微型工具的多层金属化和图案化以及元件在圆柱形基板上的表面安装的制造技术
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发表时间:
2006
期刊:
影响因子:
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通讯作者:
S.Goto
中科院分区:
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作者:
S.Goto