Flexible Capacitive Pressure Sensor Based on Laser-Induced Graphene and Polydimethylsiloxane Foam
Flexible Capacitive Pressure Sensor Based on Laser-Induced Graphene and Polydimethylsiloxane Foam
复制标题
DOI：
10.1109/jsen.2021.3054985
复制
发表时间：
2021-05-15
影响因子：
4.3
通讯作者：
Fang, Feiyu
中科院分区：
文献类型：
--
作者：
Huang, Lixiong;Wang, Han;Fang, Feiyu
柔性压力传感器已广泛应用于电子皮肤（E-skin）、人形机器人和个人医疗保健等领域。激光诱导石墨烯（LIG）具有一步制备、优异的机械性能和高导电性等优点，是制造柔性传感器的理想活性材料。介绍了一种由LIG和聚二甲基硅氧烷（PDMS）泡沫组成的柔性电容式压力传感器（FCPS）。利用激光直接在聚酰亚胺（PI）薄膜上刻写可以制备LIG。通过将LIG转移到多孔的PDMS泡沫上，FCPS获得了板-泡沫-板一体化结构，具有高灵敏度（接近0.026kPa(-1)， 15接近40kPa）和快速响应时间（接近120ms）。在动态测试中，FCPS对压力的响应表现出稳定（δ (r) = 1.785%）和低滞后（h = 9.762%）。此外，在5000次循环的压力/释放测试中，没有发现明显的信号失真，这证明了FCPS的长期耐用性。FCPS能够通过多种响应（即两个电极电阻和电极之间的电容）区分不同的外部机械刺激，包括拉伸、按压、弯曲和扭转。FCPS还用于检测关节运动、体压和动脉脉搏。为了深入研究空间压力分布，将LIG图案设计成电极阵列，开发了FCPS阵列。结果，测量值和空间压力之间有了映射。本研究采用简单、高效、低成本的技术制备了FCPS及其阵列，用于多刺激识别和触觉传感。这项研究的结果表明，FCPS及其阵列显示出制造可穿戴医疗设备、虚拟现实/增强现实（VR/AR）设备或电子皮肤的潜力。
Flexible pressure sensors have been extensively employed in a range of fields, such as electronic skin (E-skin), humanoid robots, and personal health care. Laser-induced graphene (LIG) is an ideal active material to produce flexible sensors due to its advantages of one-step fabrication, excellent mechanical performance, and high conductivity. This paper presents a flexible capacitive pressure sensor (FCPS) consisting of LIG and polydimethylsiloxane(PDMS) foam. LIG can be fabricated by using a laser to directly write on polyimide (PI) film. By transferring the LIG to a porous PDMS foam, the FCPS acquired a plate-foam-plate integrated structure and it had high sensitivity (similar to 0.026kPa(-1) in 15 similar to 40kPa) and a fast response time (similar to 120ms). In dynamic testing, the FCPS exhibited a stable (delta(r) = similar to 1.785%) and low-hysteresis (h = similar to 9.762%) response to pressure. Furthermore, no significant signal distortions were identified in 5000-cycle press/release testing, which demonstrated the long-term durability of the FCPS. The FCPS was capable of distinguishing between different external mechanical stimuli, including stretching, pressing, bending, and twisting by multiple responses (i.e., two electrode resistances and the capacitance between the electrodes). The FCPS was also employed to detect joint movements, body pressure, and arterial pulse. To study the spatial pressure distribution in depth, an FCPS array was developed by designing a LIG pattern into an electrode array. As a result, there was a mapping between the measurements and the spatial pressure. In our study, FCPS and its array were prepared for multiple stimuli identification and tactile sensing using a simple, efficient, and low-cost technique. The results from this study demonstrated that the FCPS and its array demonstrated potential for being fabricated into wearable medical devices, virtual reality/augmented reality (VR/AR) devices, or E-skin.