Semi-automated high-efficiency reflectivity chamber for vacuum UV measurements
Semi-automated high-efficiency reflectivity chamber for vacuum UV measurements
复制标题
用于真空紫外测量的半自动高效反射室
DOI：
10.1117/12.2272787
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发表时间：
2017
期刊：
影响因子：
--
通讯作者：
A. Egan
中科院分区：
文献类型：
--
作者：
James Wiley;B. Fleming;Nicholas Renninger;A. Egan
本文介绍了一种用于紫外优化光学系统的半自动反射室的设计和工作原理。在LabVIEW中设计的图形用户界面可控制载物台、与探测器系统连接、进行半自动测量并在出现错误时监控系统。样品和光学光电二极管位于安装在真空室中间旋转台上的光学板上。光学板在入射和反射位置之间旋转样品和二极管，以测量样品在70 nm至550 nm的单色器操作带通所限制的波长处的绝对反射率。一个准直抛物面反射镜上的精细转向倾斜电机使光束转向检测器峰值上升。该真空室设计用于快速进行测量，最大限度地减少监督，提高实验室效率，实现高节奏和高精度真空紫外反射率测量。
This paper presents the design and theory of operation for a semi-automated reflectivity chamber for ultraviolet optimized optics. A graphical user interface designed in LabVIEW controls the stages, interfaces with the detector system, takes semi-autonomous measurements, and monitors the system in case of error. Samples and an optical photodiode sit on an optics plate mounted to a rotation stage in the middle of the vacuum chamber. The optics plate rotates the samples and diode between an incident and reflected position to measure the absolute reflectivity of the samples at wavelengths limited by the monochromator operational bandpass of 70 nm to 550 nm. A collimating parabolic mirror on a fine steering tip-tilt motor enables beam steering for detector peak-ups. This chamber is designed to take measurements rapidly and with minimal oversight, increasing lab efficiency for high cadence and high accuracy vacuum UV reflectivity measurements.