Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip
Capacitive sensor array for localization of bioparticles in CMOS lab-on-a-chip
复制标题
用于 CMOS 芯片实验室中生物粒子定位的电容式传感器阵列
DOI：
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发表时间：
2004
期刊：
影响因子：
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通讯作者：
Roberto Guerrieri
中科院分区：
文献类型：
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作者：
Aldo Romani;N. Manaresi;Luca Marzocchi;G. Medoro;A. Leonardi;L. Altomare;M. Tartagni;Roberto Guerrieri
细胞和微珠的全电子检测是在0.35/spl mu/m 2 P3 M CMOS技术的320 x320电容传感器阵列上实现的，该技术还集成了介电泳的颗粒驱动。粒子相关的等效输入电容的变化大于0.42fF的测量与39 dB的SNR。输出噪声为/spl les/1.6mV，12 b ADC的分辨率。
Fully-electronic detection of cells and microbeads is achieved on a 320x320 array of capacitive sensors in 0.35/spl mu/m 2P3M CMOS technology that also integrates particle actuation by dielectrophoresis. Particle-associated equivalent input capacitance variations larger than 0.42fF are measured with 39dB SNR. Output noise is /spl les/1.6mV, the resolution of the 12b ADC.