A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer

A fast, parallel acquisition, electron energy analyzer: The hyperbolic field analyzer
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快速并行采集电子能量分析仪:双曲场分析仪

DOI:
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发表时间:
1999
期刊:
影响因子:
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通讯作者:
M. Prutton
M. Prutton
中科院分区:
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文献类型:
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作者:
M. Jacka;M. Kirk;M. Gomati;M. Prutton

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本文介绍了一种能在大动能范围内并行检测的新型静电带电粒子分析仪。设想的主要目的是同时探测从表面散射的能量在几十eV到大于2000 eV之间的电子。已经构造了一个原型,它近似于进入入口狭缝的电子的双曲偏转场。它的能量分辨率为几eV,收集效率为2π sr的0.05%。有效的俄歇光谱可以在不到2秒的时间内获得。光谱采集时间的显著改善为进一步发展俄歇光电子能谱提供了许多可能性。
This article describes a new kind of electrostatic charged particle analyzer capable of the parallel detection of a large kinetic energy range. The main purpose envisaged is for the simultaneous detection of electrons scattered from surfaces and having energies between a few tens of eV to greater than 2000 eV. A prototype has been constructed that approximates a hyperbolic deflection field for the electrons entering an entrance slit. It exhibits an energy resolution of a few eV and a collection efficiency of 0.05% of 2π sr. Useful Auger spectra can be acquired in a time of less than 2 s. The significant improvement in spectrum acquisition time that this represents offers many possibilities to further Auger and photoelectron spectroscopy.