Geometry Measurement of Submerged Metallic Micro-Parts Using Confocal Fluorescence Microscopy
Geometry Measurement of Submerged Metallic Micro-Parts Using Confocal Fluorescence Microscopy
复制标题
使用共焦荧光显微镜测量水下金属微型零件的几何形状
DOI：
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发表时间：
2018
影响因子：
--
通讯作者：
A. Fischer
中科院分区：
文献类型：
--
作者：
M. Mikulewitsch;M. Auerswald;Axel von Freyberg;A. Fischer
激光化学加工（LCM）制造过程中对微结构的原位几何测量对测量系统提出了很高的要求，因为试样浸没在封闭的流体回路中。制造的微组件的陡峭斜坡和普遍缺乏可达性阻碍了诸如触觉测量或传统共聚焦显微镜等标准技术的使用。一种基于共聚焦荧光显微镜的技术有望提高大曲率金属表面的可测量性。通过在试样上施加强散射荧光涂层，可以通过试样与涂层边界处荧光信号的变化来确定表面位置。与目前测试的薄涂层（$$< 100,upmu hbox {m}$$<100μm）相比，在LCM工艺中原位应用所需的厚度大于$$1,hbox {mm}$$1mm的层的测量结果显示，在浓度和折射率方面，荧光介质具有明显的依赖性。因此，需要一种基于荧光信号物理模型的完全不同的信号评估方法，从检测到的荧光强度信号中提取表面位置信息。为了验证目的，在厚流体层的条件下进行阶跃几何的测量，并与触觉测量相参考。结果表明，基于模型的方法适用于步长在厚度为$$2.3,hbox {mm}$$2.3mm的流体层中检测几何参数步长，其不确定度为$$8.8,upmu hbox {m}$$8.8μm。
The in situ geometry measurement of microstructures in the laser chemical machining (LCM) manufacturing process places high demands on measurement systems because the specimen is submerged in a closed fluid circuit. The steep slopes of the manufactured micro-components and the general lack of accessibility hinder the use of standard techniques such as tactile measurement or conventional confocal microscopy. A technique based on confocal fluorescence microscopy shows promise for increasing the measurability on metallic surfaces with large curvatures. By applying an intensely scattering fluorescent coating to the specimen, the surface position can be determined by the change in fluorescence signal at the boundary between specimen and coating. In contrast to the currently tested thin coatings ($$< 100, upmu hbox {m}$$<100μm) the measurements in layers thicker than $$ 1, hbox {mm}$$1mm, as required for in situ application at the LCM process, show distinct dependencies on the fluorescent medium in terms of concentration and index of refraction. Hence, a fundamentally different signal evaluation approach based on a physical model of the fluorescence signal is needed to extract the surface position information from the detected fluorescence intensity signal. For the purpose of validation, the measurement of a step geometry is performed under the condition of a thick fluid layer and referenced with a tactile measurement. As a result, the model-based approach is shown to be suitable to detect the geometry parameter step height with an uncertainty of $$ 8.8, upmu hbox {m}$$8.8μm for a step submerged in a fluid layer with a thickness of $$2.3, hbox {mm}$$2.3mm.
金属微生产激光化学加工闭环质量控制系统
DOI：
10.1007/s00170-017-0436-5
发表时间：
2017
期刊：
The International Journal of Advanced Manufacturing Technology
影响因子：
--
作者：
von Freyberg;Fischer
通讯作者：
Fischer