Two-dimensional array of coupled nanomechanical resonators
Two-dimensional array of coupled nanomechanical resonators
复制标题
耦合纳米机械谐振器的二维阵列
DOI：
10.1063/1.2190448
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发表时间：
2006
影响因子：
4
通讯作者：
B. Houston
中科院分区：
文献类型：
--
作者：
M. Zalalutdinov;J. Baldwin;M. Marcus;R. Reichenbach;J. Parpia;B. Houston
利用电子束光刻技术在单晶硅上制作了纳米机械平板谐振器的二维耦合阵列。集体模式进行了研究，使用一个独立的定位点激光驱动器和干涉运动检测器的双激光设置。已经证明了宽的声学频带的形成。由于无序（失谐）的本地化被确定为一个参数，限制了弹性波的传播。我们发现，在我们的20×20阵列中的所有400个谐振器参与扩展模式和估计群速度和态密度。利用谐振器阵列的射频信号处理的应用进行了讨论。
Two-dimensional arrays of coupled nanomechanical plate-type resonators were fabricated in single crystal silicon using e-beam lithography. Collective modes were studied using a double laser setup with independent positioning of the point laser drive and interferometric motion detector. The formation of a wide acoustic band has been demonstrated. Localization due to disorder (mistune) was identified as a parameter that limits the propagation of the elastic waves. We show that all 400 resonators in our 20×20 array participate in the extended modes and estimate group velocity and density of states. Applications utilizing the resonator arrays for radio frequency signal processing are discussed.