Highly Sensitive p+Si/Al Thermopile-Based Gas Flow Sensors by Using Front-Sided Bulk Micromachining Technology
Highly Sensitive p+Si/Al Thermopile-Based Gas Flow Sensors by Using Front-Sided Bulk Micromachining Technology
复制标题
采用前端体微加工技术的高灵敏度 p( )Si/Al 热电堆气体流量传感器
DOI：
10.1109/ted.2020.2974350
复制
发表时间：
2020-04-01
影响因子：
3.1
通讯作者：
Li, Xinxin
中科院分区：
文献类型：
--
作者：
Wang, Shanshan;Xue, Dan;Li, Xinxin
本文介绍了一种高性能、低成本、高产能量产的基于p(+)Si/Al热电堆的前端微加工高灵敏度气体流量传感器的设计、制造和特性。与以往报道的大多数基于p(+)Si/Al热电堆的流量传感器相比，该传感器通过将p(+)Si束的冷端嵌入到体硅中，并优化悬浮介质膜与硅衬底的绝热性，具有更高的灵敏度和更快的响应时间。建立了一维模型，并根据介质膜厚度、隔离腔高度等关键设计参数对传感器进行了优化设计。因此，采用正面体微加工技术构建了该气体流量传感器。无需双面微加工工艺，即可实现0.5 mm mm的微小尺寸。测试结果表明，该传感器具有540 mV/(SLM)/W的超高灵敏度和1.5 ms的快速响应时间。
This article presents the design, fabrication, and characterization of a front-sided microfabricated high-sensitive p(+)Si/Al thermopile-based gas flow sensor with high-performance, low-cost, and high-yield volume production. Compared to most of the previously reported p(+)Si/Al thermopile-based flow sensors, the proposed sensor has a higher sensitivity and faster response time by the realization of embedding the cold junction of the p(+)Si beam into the bulk silicon and optimizing the thermal insulation of the suspended dielectric membrane from the silicon substrate. The 1-D model is established and used to optimize the design of the proposed sensor in terms of key design parameters, including the dielectric membrane thickness, the height of the isolation cavity, and so on. Accordingly, a front-sided bulk micromachining technique is employed to construct the proposed gas flow sensor. Without the need for a double-sided micromachining process, a tiny size of 0.5 mm mm is achieved. The tested results show that the fabricated sensor has an ultrahigh sensitivity of 540 mV/(SLM)/W and a quick response time of 1.5 ms.