Fabrication of semiconductor microspheres with laser ablation in superfluid helium
Fabrication of semiconductor microspheres with laser ablation in superfluid helium
复制标题
超流氦中激光烧蚀制备半导体微球
DOI：
10.1117/12.2274888
复制
发表时间：
2017
期刊：
影响因子：
--
通讯作者：
Masaaki Ashida
中科院分区：
文献类型：
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作者：
Yosuke Minowa;Yuya Oguni;Masaaki Ashida
采用脉冲激光烧蚀法在超流氦中制备了半导体ZnO微球。扫描电子显微镜观察显示，球形度高，表面光滑。我们还观察到回音壁模式共振，微球内的电磁本征模共振，在阴极射线发光光谱，验证了所制造的微球的高对称性。此外，我们使用聚焦离子束横切微球。横截面的扫描电子显微镜观察揭示了微球内小孔的存在。内部结构的检测有助于我们理解我们的制造方法的微观机理。
We fabricated semiconductor ZnO microspheres via the pulsed laser ablation in the superfluid helium. The scanning electron microscope observation revealed the high sphericity and smooth surface. We also observed whispering gallery mode resonances, the electromagnetic eigenmode resonances within the microspheres, in the cathodoluminescence spectrum, verifying the high symmetry of the fabricated microspheres. Further, we cross-sectioned the microspheres with using focused ion beam. The scanning electron microscope observation of the cross section uncovers the existence of small holes within the microspheres. The inner structure examination helps us to understand the microscopic mechanism of our fabrication method.