MMIC internal electric field mapping with submicrometre spatial resolution and gigahertz bandwidth by means of high frequency scanning force microscope testing
MMIC internal electric field mapping with submicrometre spatial resolution and gigahertz bandwidth by means of high frequency scanning force microscope testing
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通过高频扫描力显微镜测试，实现具有亚微米空间分辨率和千兆赫带宽的 MMIC 内部电场映射
DOI：
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发表时间：
1995
期刊：
影响因子：
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通讯作者：
E. Kubalek
中科院分区：
文献类型：
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作者：
A. Leyk;E. Kubalek
除其他测量外，高频扫描力显微镜 (HFSFM) 测试还能够以高空间和时间分辨率探测单片微波集成电路 (MMIC) 内的器件内部电势分布。可以根据该数据计算电场的两个平面分量，并可以绘制它们的局部分布。首次通过 HFSFM 电势测量评估频率高达 6 GHz 的 MMIC 内叉指电容器上电场分量的二维分布，展示了这种新型 MMIC 内部电场映射技术的亚微米空间分辨率和千兆赫带宽
High frequency scanning force microscope (HFSFM) testing enables, among other measurements, the probing of device internal electric potential distributions within monolithic microwave integrated circuits (MMICs) with both high spatial and temporal resolution. Two planar components of the electric field can be calculated from this data and their local distribution can be mapped. For the first time 2-D distributions of electric field components on an interdigital capacitor within an MMIC at frequencies up to 6 GHz were evaluated from HFSFM potential measurements, demonstrating the submicrometre spatial resolution and gigahertz bandwidth of this new MMIC internal electric field mapping technique