High accuracy transfer printing of single-mode membrane silicon photonic devices
High accuracy transfer printing of single-mode membrane silicon photonic devices
复制标题
DOI：
10.1364/oe.26.016679
复制
发表时间：
2018-06-25
期刊：
影响因子：
3.8
通讯作者：
Strain, Michael J.
中科院分区：
文献类型：
--
作者：
McPhillimy, John;Guilhabert, Benoit;Strain, Michael J.
提出了一种利用悬浮膜组件进行集成光子器件微组装的转移印刷法。厚度为150 nm的超薄薄膜无需使用机械支撑和粘合层即可直接打印。采用相关对准方案，实现了单模硅光波导的垂直积分，平均放置精度为100+/-70 nm。还制作了硅(Si)Mu环谐振器，并通过改变硅总线光波导的横向绝对位置来显示可控的光学耦合。由光学学会根据知识共享署名4.0许可证的条款出版。
A transfer printing (TP) method is presented for the micro-assembly of integrated photonic devices from suspended membrane components. Ultra thin membranes with thickness of 150nm are directly printed without the use of mechanical support and adhesion layers. By using a correlation alignment scheme vertical integration of single-mode silicon waveguides is achieved with an average placement accuracy of 100 +/- 70nm. Silicon (Si) mu-ring resonators are also fabricated and show controllable optical coupling by varying the lateral absolute position to an underlying Si bus waveguide. Published by The Optical Society under the terms of the Creative Commons Attribution 4.0 License.