Dehydrogenation-enhanced large strain (-1.6%) in free-standing Simicrostructures covered with SiN stress liners
Dehydrogenation-enhanced large strain (-1.6%) in free-standing Simicrostructures covered with SiN stress liners
复制标题
脱氢增强%20large%20strain%20(-1.6%)%20in%20独立式%20Si微结构%20covered%20with%20SiN%20stress%20liners
DOI：
--
复制
发表时间：
2011
期刊：
影响因子：
--
通讯作者：
M.Miyao
中科院分区：
文献类型：
--
作者：
M.Kurosawa;T.Sadoh;M.Miyao
