Self-Assembled PbTiO3 Nano-Islands Prepared on SrTiO3 by Metalorganic Chemical Vapor Deposition
Self-Assembled PbTiO3 Nano-Islands Prepared on SrTiO3 by Metalorganic Chemical Vapor Deposition
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DOI：
10.1143/jjap.42.5918
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发表时间：
2003-09
影响因子：
1.5
通讯作者：
H. Nonomura;H. Fujisawa;M. Shimizu;H. Niu;K. Honda
中科院分区：
文献类型：
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作者：
H. Nonomura;H. Fujisawa;M. Shimizu;H. Niu;K. Honda
采用金属有机化学气相沉积（MOCVD）法在Pt（111）/SiO2/Si（100）、Pt（111）/SrTiO 3（111）和Pt（110）/SrTiO 3（110）衬底上制备了PbTiO 3纳米岛。在Pt（111）/SiO2/Si上沉积PbTiO 3时，不同Pt晶粒上的PbTiO 3纳米岛具有不同的面内取向。另一方面，Pt（111）/SrTiO 3（111）上的PbTiO 3纳米岛具有相同的面内取向。与Pt（111）/SiO2/Si（100）衬底相比，Pt（111）/SrTiO 3（111）衬底上的PbTiO 3纳米岛尺寸均匀。当PbTiO 3岛沉积在Pt（110）/SrTiO 3（110）衬底上时，获得了优先沿沿着方向生长的三棱柱形状的PbTiO 3岛。这些PbTiO 3纳米岛也具有均匀的面内取向。结果表明，利用外延生长关系，MOCVD自组装铁电纳米岛的尺寸、形状和面内取向是可控的。
PbTiO3 nano-islands were prepared on Pt(111)/SiO2/Si(100), Pt(111)/SrTiO3(111) and Pt(110)/SrTiO3(110) substrates by metalorganic chemical vapor deposition (MOCVD). When PbTiO3 was deposited on Pt(111)/SiO2/Si, PbTiO3 nano-islands on different Pt grains had different in-plane orientations. On the other hand, all PbTiO3 nano-islands on Pt(111)/SrTiO3(111) showed the same in-plane orientation. The size of PbTiO3 nano-islands on the Pt(111)/SrTiO3(111) substrate was uniform compared with that on the Pt(111)/SiO2/Si(100) substrate. When PbTiO3 islands were deposited on a Pt(110)/SrTiO3(110) substrate, triangular-prism-shaped PbTiO3 islands, which preferentially grew along the direction, were obtained. These PbTiO3 nano-islands had also uniform in-plane orientation. These results showed that the size, shape and in-plane orientation of self-assembled ferroelectric nano-islands by MOCVD were fairly controllable using the epitaxial relation.