Preparation of high-resolution magnetic force microscope tips coated with Co and FeCo films
Preparation of high-resolution magnetic force microscope tips coated with Co and FeCo films
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Co、FeCo薄膜高分辨率磁力显微镜尖端的制备
DOI：
10.1051/epjconf/20134001002
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发表时间：
2013
期刊：
影响因子：
--
通讯作者：
and Masaaki Futamoto
中科院分区：
文献类型：
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作者：
Tatsuya Hagami;Kazuki Soneta;Mitsuru Ohtake;and Masaaki Futamoto
在半径为4nm的Si针尖上镀覆Co和Fe_（65）Co_（35）（at. %）薄膜。研究了涂层厚度对MFM空间分辨率的影响。随着厚度从10 nm增加到20 nm，Co和FeCo涂层针尖的分辨率分别从8.4 nm提高到6.9 nm和从7.5 nm提高到6.6 nm。获得更好的分辨率的FeCo涂层的提示，这是由于增强的灵敏度与较高的磁矩的FeCo材料。随着涂层厚度的进一步增加，由于尖端半径的增加，分辨率变差。分辨率受检测灵敏度和针尖半径的影响。记录在1800 kFCI（位长：14.1 nm）和1900 kFCI（13.4 nm）的垂直介质的磁性位分别是可区分的MFM图像中观察到的使用与Co和FeCo膜涂层的尖端。
Magnetic force microscope (MFM) tips are prepared by coating Si tips of 4 nm radius with Co and Fe65Co35(at. %) films by employing an ultra-high vacuum evaporation system. The effect of coating film thickness on MFM spatial resolution is investigated. With increasing the thickness from 10 to 20 nm, the resolutions of Co- and FeCo-coated tips improve from 8.4 to 6.9 nm and from 7.5 to 6.6 nm, respectively. Better resolutions are obtained for the FeCo-coated tips, which is due to enhanced sensitivities related with the higher magnetic moment of FeCo material. As the coating thickness further increases, the resolutions deteriorate due to increase of tip radius. The resolution is affected by the detection sensitivity and the tip radius. Magnetic bits of a perpendicular medium recorded at 1800 kFCI (bit length: 14.1 nm) and 1900 kFCI (13.4 nm) are respectively distinguishable in the MFM images observed by using tips coated with Co and FeCo films.