Numerical analysis of injection level dependent effective lifetime on 125 mm undiffused lifetime samples
Numerical analysis of injection level dependent effective lifetime on 125 mm undiffused lifetime samples
复制标题
对 125 mm 非扩散寿命样品的注入水平相关有效寿命进行数值分析
DOI：
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发表时间：
2014
期刊：
影响因子：
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通讯作者：
B. Hoex
中科院分区：
文献类型：
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作者：
Fa‐Jun Ma;Z. Hameiri;G. Samudra;M. Peters;B. Hoex
在 125 mm 未扩散寿命样品（其表面由于场效应钝化而处于反转状态）上观察到在低注入水平下少数载流子寿命有效缩短。通过数值分析，我们表明边缘重组不足以解释这些样本上的这种现象。在表面损伤和可以解释减少的不对称整体寿命机制之间，表面损伤被证实更为合理。我们证明，通过数值模拟，假设表面损伤（700 nm 薄层的整体寿命要低得多），可以很好地再现测量的有效寿命曲线。
Effective minority carrier lifetime reduction at low injection levels is observed on 125 mm undiffused lifetime samples whose surfaces are under inversion due to field-effect passivation. With numerical analysis, we show that edge recombination is insufficient to account for this phenomenon on these samples. Between surface damage and asymmetric bulk lifetimes mechanisms that can account for the reduction, surface damage is confirmed to be more plausible. We demonstrate that the measured effective lifetime curves can be well reproduced assuming surface damage, a 700 nm thin layer with much lower bulk lifetimes, with numerical simulation.