Vacuum arc coatings for tools: potential and application
Vacuum arc coatings for tools: potential and application
复制标题
DOI：
10.1016/0257-8972(95)02499-9
复制
发表时间：
1995-12
影响因子：
5.4
通讯作者：
J. Vetter
中科院分区：
文献类型：
--
作者：
J. Vetter
阴极真空电弧蒸发广泛用于在工具和机械部件上存款硬质耐磨涂层。本文综述了不同的硬涂层，如单层和多层形式的MeNN，（Me1，Me2）N，Me（N，C），以及在组合涂层的形式沉积的潜力。选定的涂层的具体性能进行了讨论，鉴于其应用的工具。
Cathodic vacuum arc evaporation is widely used to deposit hard wear-resistant coatings onto tools and machine parts. This paper reviews the potential for deposition of different hard coatings, e.g. MeN, (Me1, Me2)N, Me(N,C) in monolayer and multilayer forms as well as in the form of combination coatings. Specific properties of selected coatings are discussed in view of their applications for tools.