Orientation-controlled growth of single-crystal silicon-nanowire arrays

Orientation-controlled growth of single-crystal silicon-nanowire arrays
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DOI:
10.1002/adma.200400474
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发表时间:
2005-01-18
期刊:
影响因子:
29.4
通讯作者:
Fan, SS
Fan, SS
中科院分区:
材料科学1区
文献类型:
--
作者:
Ge, SP;Jiang, KL;Fan, SS

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利用气-液-固外延生长机制,可以在硅衬底上合成具有精确取向的硅纳米线阵列,这取决于衬底的晶体取向。所生长阵列的投影在硅(100)衬底上形成矩形网络(见图),在硅(110)衬底上形成平行直线,在硅(111)衬底上形成三角形网络。
Silicon nanowire arrays on silicon substrates can be synthesized with precise orientation depending on the crystal orientation of the substrate using a vapor-liquid-solid epitaxial growth mechanism. The projections of the as-grown arrays form rectangular networks on silicon (100) substrates (see Figure), parallel straight lines on silicon (110) substrates, and triangular networks on silicon (111) substrates.