Orientation-controlled growth of single-crystal silicon-nanowire arrays
Orientation-controlled growth of single-crystal silicon-nanowire arrays
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DOI:
10.1002/adma.200400474
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发表时间:
2005-01-18
影响因子:
29.4
通讯作者:
Fan, SS
中科院分区:
文献类型:
--
作者:
Ge, SP;Jiang, KL;Fan, SS
Silicon nanowire arrays on silicon substrates can be synthesized with precise orientation depending on the crystal orientation of the substrate using a vapor-liquid-solid epitaxial growth mechanism. The projections of the as-grown arrays form rectangular networks on silicon (100) substrates (see Figure), parallel straight lines on silicon (110) substrates, and triangular networks on silicon (111) substrates.