Experimental investigation for optimizing the fabrication of a sapphire capillary using femtosecond laser machining and diamond tool micromilling
Experimental investigation for optimizing the fabrication of a sapphire capillary using femtosecond laser machining and diamond tool micromilling
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DOI：
10.1016/j.cirp.2020.04.087
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发表时间：
2020-01-01
影响因子：
4.1
通讯作者：
Yamazaki, Kazuo
中科院分区：
文献类型：
--
作者：
Katahira, Kazutoshi;Ogawa, Yoshinori;Yamazaki, Kazuo
激光等离子体加速器需要高效且精确制造的蓝宝石毛细管。应用了一种将飞秒激光加工和金刚石刀具微铣削相结合的混合制造工艺。通过使用安装在五轴机床上的飞秒激光，在5小时内于蓝宝石板上制造出了一个槽宽为630微米、长度为90毫米的毛细管。用多晶金刚石立铣刀铣削后，圆柱槽底部的表面粗糙度Sa值达到7.1纳米。（C）2020年CIRP。由爱思唯尔有限公司出版。保留所有权利。
Sapphire capillaries manufactured with high efficiency and precision are needed for use in laser-plasma accelerators. A hybrid manufacturing process combining femtosecond laser machining and diamond tool micromilling was applied. By using a femtosecond laser mounted on a 5-axis machine, a capillary with a groove width of 630 mu m and length of 90 mm was fabricated on a sapphire plate within 5 h. The surface roughness of the bottom of the cylinder groove was finished to 7.1 nm in Sa by milling with a polycrystalline diamond end mill. (C) 2020 CIRP. Published by Elsevier Ltd. All rights reserved.