Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment
Reproducibility in X-ray reflectometry: results from the first world-wide round-robin experiment
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DOI：
10.1107/s0021889807051904
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发表时间：
2008-02-01
影响因子：
6.1
通讯作者：
Wiemer, C.
中科院分区：
文献类型：
--
作者：
Colombi, P.;Agnihotri, D. K.;Wiemer, C.
X射线反射计（XRR）是一种成熟的技术，用于定量评估薄层的电子密度、厚度和粗糙度。在本文中，第一个世界范围内的XRR循环实验，涉及20个实验室的结果，介绍和讨论。循环实验是在VAMAS项目“用于薄膜和多层膜评估的X射线反射率测量”的框架内进行的，其目的是为XRR制作一个“良好实践”手册。使用不同的设备获得的测量的再现性进行了研究。实验数据拟合的影响与实验因素相比是不可忽略的。动态强度范围被证明是获得良好质量测量的重要参数。一个更简单的测试样本，不发展表面氧化层随着时间的推移，现在是一个后续研究的主题。
X-ray reflectometry (XRR) is a well established technique to evaluate quantitatively electron density, thickness and roughness of thin layers. In this paper, results of the first world-wide XRR round-robin experiment, involving 20 laboratories, are presented and discussed. The round-robin experiment was performed within the framework of the VAMAS Project 'X-ray reflectivity measurements for evaluation of thin films and multilayers', the aim of which is to produce a 'good practice' manual for XRR. The reproducibility of measurements obtained using different equipment has been investigated. The influence of the fitting of the experimental data was shown to be non-negligible compared with the experimental factors. The dynamic intensity range proves to be an important parameter for obtaining a good quality measurement. A simpler test sample which does not develop a surface oxide layer over time is now the subject of a follow-up study.