Advancing the Hexapole Cs-Corrector for the Scanning Transmission Electron Microscope

Advancing the Hexapole Cs-Corrector for the Scanning Transmission Electron Microscope
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DOI:
10.1017/s1431927606060600
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发表时间:
2006-10
影响因子:
2.8
通讯作者:
H. Müller;S. Uhlemann;P. Hartel;M. Haider
H. Müller;S. Uhlemann;P. Hartel;M. Haider
中科院分区:
工程技术4区
文献类型:
--
作者:
H. Müller;S. Uhlemann;P. Hartel;M. Haider

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使用六极场的像差校正器已被证明是有用的,以校正电子显微镜中的球面像差。我们调查的限制,目前的设计为六极校正器相对于最小探针尺寸的扫描透射电子显微镜和讨论几种方法,在该设计中,可以改进相当小的和增量的设计变化,为下一代先进的探针形成系统配备了枪单色器。
Aberration correctors using hexapole fields have proven useful to correct for the spherical aberration in electron microscopy. We investigate the limits of the present design for the hexapole corrector with respect to minimum probe size for the scanning transmission electron microscope and discuss several ways in which the design could be improved by rather small and incremental design changes for the next generation of advanced probe-forming systems equipped with a gun monochromator.