Toward a Better Understanding of the Influence of the Hydrocarbon Precursor on the Mechanical Properties of a‐C:H Coatings Synthesized by a Hybrid PECVD/PVD Method
Toward a Better Understanding of the Influence of the Hydrocarbon Precursor on the Mechanical Properties of a‐C:H Coatings Synthesized by a Hybrid PECVD/PVD Method
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DOI：
10.1002/ppap.201500050
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发表时间：
2016-03
影响因子：
3.5
通讯作者：
D. Thiry;Aurore De Vreese;F. Renaux;J. Colaux;S. Lucas;Y. Guinet;L. Paccou;E. Bousser;R. Snyders
中科院分区：
文献类型：
--
作者：
D. Thiry;Aurore De Vreese;F. Renaux;J. Colaux;S. Lucas;Y. Guinet;L. Paccou;E. Bousser;R. Snyders
2015Wiley-VCH Verlag GmbH&Co.KGaA，Weinheim。研究了前驱体CH4和C2H2对PECVD/PVD复合法制备的a-C：H涂层力学性能的影响。在一组给定的等离子体参数下，发现在CH4/Ar混合气体中合成的薄膜比在C2H2/Ar气氛中制备的薄膜更硬，尽管它们的sp3密度更低，氢含量相似。这种不寻常的行为归因于组成薄膜的聚合物网络的不同分子组织。考虑到成膜物种的化学性质对薄膜的交联度和支化度的影响，对后者进行了解释。我们的整套结果清楚地表明，为了解释a-C：H层的力学性质，必须考虑比sp3和氢含量更多的因素。
© 2015 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim. In this work, we provide new insight on the influence of the precursor (CH 4 vs. C 2 H 2 ) on the mechanical properties of a-C:H coatings synthesized in a hybrid PECVD/PVD process. For a given set of plasma parameters, the films synthesized in CH 4 /Ar gas mixture are found harder than the ones prepared in C 2 H 2 /Ar atmosphere despite their lower sp 3 density and similar hydrogen content. This unusual behavior is attributed to different molecular organization of the polymeric network constituting the films. The latter is explained considering the influence of the chemical nature of the film-forming species on the cross-linking and branching degree of the films. The whole set of our results unambiguously demonstrates that additional factors than the sp 3 and hydrogen content have to be considered for explaining the mechanical properties of a-C:H layers.