A smart material microamplification mechanism fabricated using LIGA
A smart material microamplification mechanism fabricated using LIGA
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DOI：
10.1088/0964-1726/7/1/012
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发表时间：
1998-02-01
影响因子：
4.1
通讯作者：
Garcia, E
中科院分区：
文献类型：
--
作者：
Pokines, BJ;Garcia, E
提出了一种将智能材料和微机电系统概念相结合而形成的独特的微放大机制。该微放大装置通过放大压电陶瓷应变来增加压电陶瓷材料的有用致动行程。所展示的技术具有实用性，作为驱动微压电马达，助听器传感器和精密光开关的微致动机制。微型放大器，约2000 μ m × 200 μ m × 800 μ m，由电镀镍和使用LIGA构建。微致动器系统的要求和缩放的挠曲放大器的优点的概述说明了新设备的实用性。微放大器是一个介观机制的根本缩放版本。操作的分析讨论提出了沿着与有限元分析的静态和动态特性的微杠杆。分析研究用于开发的工作原理和预期的性能的微放大器。实验静态和动态测试结果证实了分析研究。该机构的平均放大比为5.48，弹性行程范围为8 μ m，基频为82 kHz。
A unique microamplification mechanism formed through the merging of smart material and microelectromechanical system concepts is presented. This microamplification device increases the useful actuation stroke of piezoceramic material through the amplification of piezoceramic strain. The technology demonstrated has utility as a microactuation mechanism for driving micropiezomotors, hearing aid transducers and precision optical switches. The microamplifier, approximately 2000 mu m x 200 mu m x 800 mu m, is composed of electroplated nickel and was constructed using LIGA. An overview of microactuator system requirements and the advantages of scaling the flexure based amplifier illustrates the utility of the new device. The microamplifier is a radically scaled version of a mesoscopic mechanism. An analytical discussion of the operation is presented along with a finite-element analysis of the static and dynamic properties of the microlever. The analytical study is used to develop the operation principles and expected performance of the microamplifier. Experimental static and dynamic testing results are presented that confirm the analytical study. The mechanism has a mean amplification ratio of 5.48, an elastic stroke range of 8 mu m and a fundamental frequency of 82 kHz.