Electrical, structural and optical properties of SnO2 thin films prepared by spray pyrolysis
Electrical, structural and optical properties of SnO2 thin films prepared by spray pyrolysis
复制标题
DOI：
10.1016/j.jnoncrysol.2005.11.031
复制
发表时间：
2006-03-01
影响因子：
3.5
通讯作者：
Pakma, O
中科院分区：
文献类型：
--
作者：
Serin, T;Serin, N;Pakma, O
研究了衬底温度对喷雾沉积法制备的未掺杂SnO 2薄膜的结构、光学、形貌和电学性能的影响。这些薄膜是在300-500摄氏度的各种衬底温度下以50摄氏度的步长沉积的，并通过不同的光学和结构技术进行表征。X射线衍射研究表明，薄膜的晶粒尺寸和择优生长方向依赖于衬底温度。这些研究还表明，薄膜在300摄氏度下是非晶的，而在其他衬底温度下是多晶的。红外和可见光谱研究表明，一个强的振动带，特征的SnO 2伸缩模式，是目前约630厘米（-1），并在可见光区的光学透射率在75-95%的范围内变化与基板温度，分别。在400 ℃下沉积的薄膜表现出最高的导电性能。(c)2005 Elsevier B. V.保留所有权利。
This study investigated the effect of the substrate temperature on the structural, optical, morphological, and electrical properties of undoped SnO2 films prepared by a spray deposition method. The films were deposited at various substrate temperatures ranging from 300-500 degrees C in steps of 50 degrees C and characterized by different optical and structural techniques. X-ray diffraction studies showed that the crystallite size and preferential growth directions of the films were dependent on the substrate temperature. These studies also indicated that the films were amorphous at 300 degrees C and polycrystalline at the other substrate temperatures used. Infrared and visible spectroscopic studies revealed that a strong vibration band, characteristic of the SnO2 stretching mode, was present around 630 cm(-1) and that the optical transmittance in the visible region varied over the range 75-95% with substrate temperature, respectively. The films deposited at 400 degrees C exhibited the highest electrical conductivity property. (c) 2005 Elsevier B.V. All rights reserved.