Design of A flexure-based mixed-kinematic XY high-precision positioning platform with large range
Design of A flexure-based mixed-kinematic XY high-precision positioning platform with large range
复制标题
基于柔性的大范围混合运动XY高精度定位平台设计
DOI：
10.1016/j.mechmachtheory.2019.103609
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发表时间：
2019-12-01
影响因子：
5.2
通讯作者：
Qian, Jianqiang
中科院分区：
文献类型：
--
作者：
Lin, Rui;Li, Yingzi;Qian, Jianqiang
带有机械结构的压电叠堆驱动器在扫描探针显微镜中被广泛用于实现高精度定位。然而，它们的定位范围只能达到几百微米，无法满足大尺度成像的需求，尤其是对于生物样本。为了克服这些缺点，本文提出了一种基于柔性结构的解耦XY高精度大行程定位平台，其具有简单紧凑的机械结构。采用叶型柔性铰链来实现大行程定位。基于叶型柔性铰链，提出了一种新颖的混合运动机构，它将串联和并联运动机构结合在一起，以简化平台的机械结构使其紧凑。此外，通过采用一种新颖的解耦结构实现了XY解耦。精确设计结构参数和铰链的布置，以确保毫米级定位范围处于安全水平。通过有限元分析对平台的定位范围、共振频率和安全性等性能进行了分析。平台测试的实验结果表明，该平台能够实现毫米级定位，且两个轴之间具有良好的解耦。实验得到的固有频率也表明所设计的平台能够实现大范围的高速定位。（C）2019爱思唯尔有限公司。保留所有权利。
Piezoelectric stack actuators with mechanical structure are widely used in scanning probe microscope to achieve high-precision positioning. However, their positioning ranges can only reach a few hundred microns, which cannot meet the demand of large-range imaging, especially for biological samples. To overcome these shortcomings, a flexure-based decoupled XY high-precision and large-range positioning platform with simple and compact mechanical structure is proposed in this paper. Leaf-type flexure hinges are used to achieve large-range positioning. Based on the leaf-type flexure hinges, a novel mechanism called mixed-kinematic mechanism, which combines serial and parallel kinematic mechanism together, is proposed to simplify the mechanical structure of the platform to make it compact. In addition, XY decoupling is achieved by adopting a novel decoupling structure. Structural parameters and the arrangement of hinges are precisely designed to guarantee the millimeter-level positioning range within safe levels. The performances of the platform including positioning range, resonant frequency and safety are analyzed through finite-element analysis. Experimental results of the platform tests demonstrate that the platform can achieve millimeter-level positioning with good decoupling between the two axes. The eigenfrequencies obtained by experiments also indicate that the designed platform is capable of high-speed positioning with large range. (C) 2019 Elsevier Ltd. All rights reserved.