Design of microstereolithography system based on dynamic image projection for fabrication of three-dimensional microstructures
Design of microstereolithography system based on dynamic image projection for fabrication of three-dimensional microstructures
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DOI：
10.1007/bf02916326
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发表时间：
2006-12-01
影响因子：
1.6
通讯作者：
Choi, Kyung Hyun
中科院分区：
文献类型：
--
作者：
Choi, Jae Won;Ha, Young Myoung;Choi, Kyung Hyun
随着对具有高纵横比的复杂微结构的需求的增加，现有的方法MEMS和LIGA难以应对掩模的数量和可制造的高度。微立体光刻技术由于不需要掩模，能够制作高深宽比的微结构，可以满足这些要求。在这项技术中，3D部件是通过堆叠层，2D截面，这是从STL文件切片，和动态图像投影过程，使树脂表面固化的动态图像生成的DMD TM（数字微镜设备）和一个照射。在本文中，我们解决的光学设计过程中，实现这种微立体光刻系统，需要光路的基础上DMD操作和图像形成的树脂表面上使用的光学设计程序考虑。为了验证该实现的微立体光刻系统的性能，制造了具有高纵横比的复杂3D微结构。
As demands for complex microstructures with high aspect ratios have increased, the existing methods, MEMS and LIGA, have had difficulties coping with the number of masks and fabricable heights. A micro stereo lithography technology can meet these demands because it has no need of masks and is capable of fabricating high aspect ratio microstructures. In this technology, 3D part is fabricated by stacking layers, 2D sections, which are sliced from STL file, and the Dynamic Image Projection process enables the resin surface to be cured by a dynamic image generated with DMD TM (Digital Micromirror Device) and one irradiation. In this paper, we address optical design process for implementing this microstereolithography system that takes the light path based on DMD operation and image-formation on the resin surface using an optical design program into consideration. To verify the performance of this implemented microstereolithography system, complex 3D microstructures with high aspect ratios were fabricated.